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  • Maintenance on the “Applied Materials Centura 5200” 200 mm plasma etching tool fully remanufactured and augmented by memsstar. Photo: Fraunhofer ENAS / Cornelia Schubert

    Fraunhofer ENAS and memsstar Limited are partnering. In order to ensure the quality of the reactive ion etching processes in MEMS manufacturing and the throughput Fraunhofer ENAS works now with a fully remanufactured “Applied Materials Centura 5200” 200 mm plasma etching tool.

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  • The annual Smart Systems Integration Conference and Exhibition will be held in Bruges, Belgium, March 28-30, 2023. The conference systematically addresses all system integration aspects. This includes integration of different functionalities, heterointegration, packaging, software integration including firmware as well as reliability and safety aspects. The SSI connects science, industry and politics. It is the platform for networking of the different experts on the one hand from the hardware and software area, on the other hand from the different levels of the products, from system-on-chip over system-in-a-package up to system-of-systems for different application domains. At the same time the apc|m conference takes place in the Bruges conference center. Both conferences have their own profile, but the common venue gives participants the opportunity to exchange ideas on topics of mutual interest and to cross-fertilize.

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  • The Fraunhofer ENAS Research Award for outstanding scientific achievements was presented by Prof. Karla Hiller, Chair of the Research Award Jury, Dr. Sven Zimmermann and the Institute Director Prof. Harald Kuhn. The award winner Dr. Chris Stöckel received the research award for his developments of technologies and devices for piezoelectric microsystems. Photo: Conny Schubert / Fraunhofer ENAS
    © Conny Schubert / Fraunhofer ENAS

    The Fraunhofer Institute for Electronic Nano Systems is a specialist in the development of innovative sensors and actuators as well as their integration into application-oriented systems. The focus of the development lies on systems and novel components based on future-oriented technologies, which significantly expand the state of the art with intelligent system integration and are tailored to the requirements of the respective users. Dr. Chris Stöckel has successfully established a microsystem platform (MEMS platform) based on piezoelectric aluminum nitride and receives the Fraunhofer ENAS Research Award 2021 for this.

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  • Fraunhofer Executive Board confirms continuation of the Micro/Nano Performance Center / 2022

    Technological sovereignty to counter micro-chip shortage: combining expertise in research and development for microelectronics in Saxony

    Chemnitz / April 07, 2022

    The economic consequences of the current chip shortage highlight the importance of microelectronics. In order to prepare for the future, technological sovereignty in microelectronics research and development is required, in addition to new production facilities in Europe. This is precisely the challenge that the High Performance Center "Functional Integration for Micro- /Nanoelectronics" is addressing. It combines the competencies of four microelectronics institutes of the Fraunhofer-Gesellschaft as well as of research groups at universities in Dresden and Chemnitz. This way, the center offers a whole spectrum of microelectronics and micromechanics technologies to both major players in the microelectronics industry and small and medium-sized enterprises (SMEs). SMEs in particular can profit from a low-threshold service through the provision of technology platforms, which allows them to benefit from leading edge technology without the burden of excessively high development cost.

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  • InPrint Munich 2022 and LOPEC 2022 / 2022

    Technologies for the production of printed functionalities on 3D objects

    Chemnitz / March 01, 2022

    Robotergeführter Inkjet-Druck einer Heizleiterstruktur für eine beheizbare Sitzschale: Versuchsstand am Fraunhofer ENAS mit Roboter Yaskawa GP8. (Bild © Fraunhofer ENAS)
    © Fraunhofer ENAS

    The Fraunhofer Institute for Electronic Nano Systems ENAS is presenting various printing technologies for functionalizing 3D objects at this year‘s LOPEC in Munich. Applications range from contacting individual microchips in electronic systems to large-area heating structures for seats. At the booth, the research team will show a robot setup with an integrated print head for inkjet printing and functionalized prototypes.

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  • Presented at the MEMS Sensing & Network System 2022 / 2022

    Inductive bonding – A new bonding method in microsystems technology

    Toyko/Japan / January 28, 2022

    IR image of inductive heating of the multi-chip setup with Ag paste array onto the DBC substrate. The target temperature of 300 °C is reached in only five seconds. Foto  © Fraunhofer ENAS
    © Fraunhofer ENAS

    The Fraunhofer Institute for Electronic Nano Systems ENAS is developing a new bonding technology for microsystems in cooperation with Chemnitz University of Technology and SHINKO ELECTRIC INDUSTRIES CO., LTD. The chip-level inductive bonding process will be presented for the first time at MEMS Sensing & Network System 2022 in Tokyo.

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  • Foto (a) und lichtmikroskopische Aufnahme (b) einer ultra-dünnen flexiblen Parylene-basierten Leiterplatte mit zwei Umverdrahtungsebenen aus Gold. (Foto @ Fraunhofer ENAS)
    © Fraunhofer ENAS

    Scientists at the Fraunhofer Institute for Electronic Nano Systems ENAS in Chemnitz successfully developed and manufactured flexible printed circuit boards with an overall thickness of less than 20 micrometers and several metallization layers based on the polymer Parylene. The institute presents the new generation of flexible PCB this fall at the COMPAMED and the SEMICON Europa 2021.

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