Fraunhofer ENAS presents at this year's SEMICON Europa together with Fraunhofer IPMS and IZM as well as Forschungsfabrik Mikroelektronik Deutschland its research results from micro- and nanoelectronics.

We present Nanofabrication in Chemnitz in the interaction of simulation, AI, technology and inline measurement techniques. We also show bonding and printing technologies on substrate sizes from 100 to 200 mm and on chip level as well as an ultrasonic transducer based measurement system.