Demonstrators and Prototypes

Smart systems consist of different components. The following demonstrators and prototypes have been developed and may be further developed on customer demand.

 

High-precision silicon-based inertial sensors

• Gyroscopes
• Acceleration sensors
• Inclination sensors
• Vibration sensors

 

RF MEMS

• Switches
• Varactors

 

Ultra-low power MEMS

• Wake-up MEMS

 

Optical sensors / MOEMS

• Fabry-Pérot filters
• Optical grating
• Controllable detectors
• Optical sensors
• Quantum dot-based systems
• Photonic integrated circuits

 

Pressure and force transducers

• Ultrasonic transducer
• MEMS loudspeaker
• Pressure sensitive resonators

 

1D/2D-based systems

• Nanostructured flexible electrodes
• CNT FET module compatible with CMOS (e.g., on top of BEOL)
• Sensor arrays for miniaturized multiparameter sensors (e.g., gas sensor, bio sensor)
• Multi-bit PUF for hardware security
• Radio frequency CNTFET
• IR emitter
• Tactile sensor

 

Magnetic field sensors (GMR- and TMR-based)

• 2D compass sensor
• Magnetic marker detection in fluids

 

Printed components

• Printed batteries
• Printed antennas (smart labels)

 

Material and structural sensors

• Nanocomposite-based systems
• Acceleration sensors
• Acoustic emission sensors
• Humidity sensor
• Sensors for mechanical and thermomechanical load

 

Fluidics

• Microfluidic systems for liquid samples