The world‘s largest exhibition focusing on micro/MEMS and nanotechnologies takes place in Tokyo since 1990. From July 3rd to July 5th exhibitors from all over the world are offering new vision in micro-fabrication technology, devices, and solutions on the nanomicro biz the former Micromachine/MEMS exhibition. It is just the 10th time that Fraunhofer ENAS shows actual research and development results and prototypes at this exhibition.This year Fraunhofer ENAS focuses on innovative technologies for system integration like reactive wafer bonding and technologies for 3D integration. Moreover prototypes like high-precision silicon based inertial sensors and polymer based sensors for humidity and acceleration are shown. One highlight is the RF MEMS switch developed for frequencies up to 60 GHz with a switching time of 10 micro seconds. The switch works with a high driving force even at low voltages less than 5 V. This MEMS is developed for communication systems. Life times of one billion switching cycles have been reached.In 2012, the Fraunhofer Project Center “NEMS / MEMS Devices and Manufacturing Technologies at Tohoku University” was founded in Sendai/ Japan. With the project center, R&D results are transferred into the industry. Professor Masayoshi Esashi from Tohoku University and Professor Thomas Gessner, director of Fraunhofer ENAS, coordinate the project center. Fraunhofer ENAS also cooperates with the WPI-AIMR at the Tohoku University in Sendai. So research results of the Gessner group of the WPI-AIMR are also shown on booth D-31.On July 4, 2013, professor Thomas Gessner will talk about “3D integration for Smart Systems“ at the 6th Japanese-German Micro/Nano Business Forum organized by IVAM Microtechnology Network.