The World's Largest Semiconductor Industry Platform
hall N2, booth 2677
German Pavilion
At this year's SEMICON China we present within the German Pavilion in hall N2 the following topics:
Optical sensor system for quality controll of electrochemical solutions
demonstration system
High-presicion MEMS / inertial sensors
high-presicion MEMS, as inclination sensor, 5g acceleraometer, 2 axes acceleration sensor
Nano structured and nanoparticel-based sensors
humidity sensor demonstration system and samples on foil and glass substrate
Fabry-Pérot-Interferometer, Filterchips
Low-temperature waferbonding technologies
reaktive bonding
surface-activated direct bonding
SLID bonding
Packaging
multi-functional MEMS for high-temperature applications
Parylene deposition
Aerosol-Jet printing
3D integration technologies
MEMS samples with integrated TSV
Silicon interposer
The Fraunhofer ENAS exhibits a monitoring system for quality control of liquid solutions, e.g. process liquids, at SEMICON China 2018. It quantify essential ingredients of specific liquid solutions. By detecting a deviation to the predetermined parameters, the consistence of the solution can be regulated directly. The sensor system works autonomously with short measurement times and can be adapted to different applications.
Das Fraunhofer ENAS stellt ein Monitoringsystem für die Qualitätskontrolle von Flüssigkeiten und Lösungen, wie z.B. Prozessflüssigkeiten, auf der SEMICON China 2018 vor. Das System stellt fest, ob Parameter von ihrem vordefinierten Wert abweichen. Die Zusammensetzung der Lösung kann dann, wenn nötig, direkt nachreguliert werden. Das Sensorsystem arbeitet autark mit kurzen Messzeiten und kann an verschiedenen Anwendungen angepasst werden.
Ray Saupe, research fellow Fraunhofer ENAS, presents at the CSTIC 2018
Sun, March 11, 2018, at 3:55 p.m.
“Nanostructures for Smart Systems"
at the symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies
in session II: Semiconductor Technology in Healthcare
meeting room：3I+3J, Shanghai International Convention Center
Fraunhofer Institute for Electronic Nano Systems