Fraunhofer Institute for Electronic Nano SystemsWelcome to the download area of the Fraunhofer-Institute for Electronic Nano Systems ENAS. Here you can download data sheets about the products and applications of Fraunhofer ENAS, information brochures about the institution as well as the annual report as pdf files.
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Tabbed contents
Brochures
Here you can download current brochures of the institute and departments as well as brochures related to specific topics.
R&D Services
Brochures of the Institute
Brochures of the departments
Center for Microtechnologies
Fraunhofer Project Center
Data sheets
On this page you can download data sheets from the Fraunhofer ENAS which address the topics sensor / actuators and systems, technology and testing. All information contained in the datasheets are preliminary and subject to change. Furthermore, the described systems, materials and processes are not commercial products. These are prototypes which can be further developed by Fraunhofer ENAS on customer request.
Components
| inertial sensors | |
| High precision +/- 10° inclination sensor | Download |
| energy supply | |
| Printed Thin Film Battery | Download |
| Printed Thin Film Battery (Japanese) | Download |
| Smart universal power antennas for wireless energy transmission | Download |
| communication | |
| Printed Antennas | Download |
| Printed Antennas (Japanese) | Download |
Systems
| Miniaturized NIR/MIR-Spectrometer | Download |
| Miniaturized NIR/MIR-Spectrometer (Japanese) | Download |
| Miniaturized turnable Band-Pass fllters for the infrared spectral range | Download |
| Sensor Integration with Autarkic Power Supply into a Simmering | Download |
| Grease Sensor for Condition Monitoring of Rolling Bearings | Download |
| ASTROSE - Autarkic Sensor Network for Condition Monitoring of Power Lines | Download |
| Fully-integrated microfluidic cartridges for in-vitro diagnostics | Download |
Simulation
System Integration & Packaging
| bonding | |
| Direct Bonding using chemical reactive plasma discharge | Download |
| Direct Bonding using chemical reactive plasma discharge (Japanese) | Download |
| Reactive bonding by using multi nano layer systems | Download |
| Reactive bonding by using multi nano layer systems (Japanese) | Download |
| Thermocompression wafer bonding with thin metal layers | Download |
| Thermocompression wafer bonding with thin metal layers (Japanese) | Download |
| Solid-liquid interdiffusion bonding (SLID) at wafer level | Download |
| Solid-liquid interdiffusion bonding (SLID) at wafer level (Japanese) | Download |
| Semi-finished bonded substrates | Download |
| Semi-finished bonded substrates consisting of photosensitive Foturan and Borofloat 33 | Download |
| Semi-finished bonden substrates consisting of piezo- and pyroelectric lithium tantalate and glass | Download |
| Semi-finished bonded substrates: Silicon on glass (SOG) | Download |
| Semi-finished bonded substrates consisting of lithium tantalate and Silicon | Download |
| Semi-finished bonded substrates: SOI-Wafer (Silicon on insulator) | Download |
| 3D Integration | |
| 3D Integration: TSV processes and wafer thinning | Download |
| 3D Integration: TSV processes and wafer thinning (Japanese) | Download |
| Silicon Interposer for 3D sensor systems | Download |
| further technologies | |
| Screen Printing for MEMS Packaging and Wafer bonding | Download |
| Aerosol Jet Printing | Download |
| Aerosol Jet Printing (Japanese) | Download |
| characterization | |
| Hermeticity characterization of packaged micro chips | Download |
| Mechanical characterization of the bonding strength | Download |
| Scanning Acoustic Microscopy | Download |
Technologies
| Nanoimprint Lithography | Download |
| Atomic Layer Deposition and targeted application areas | Download |
| Atomic Layer Deposition and targeted application areas (Japanese) | Download |
| Integration of Carbon Nanotubes and Applications | Download |
| Integration of Carbon Nanotubes and Applications (Japanese) | Download |
| Electro Chemical Deposition from Ionic Liquids | Download |
Test procedure
| MEMS Parameter Identifikation | Download |
Annual Report
With our annual report we inform customers, journalists and a broad public about current topics and trends in the applied research and development of our institute.