Fraunhofer Institute for Electronic Nano SystemsWelcome to the download area of the Fraunhofer-Institute for Electronic Nano Systems ENAS. Here you can download data sheets about the products and applications of Fraunhofer ENAS, information brochures about the institution as well as the annual report as pdf files.
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Brochures
Here you can download current brochures of the institute and departments as well as brochures related to specific topics.
R&D Services
Brochures of the Institute
Brochures of the departments
Center for Microtechnologies
Data sheets
On this page you can download data sheets from the Fraunhofer ENAS which address the topics sensor / actuators and systems, technology and testing. All information contained in the datasheets are preliminary and subject to change. Furthermore, the described systems, materials and processes are not commercial products. These are prototypes which can be further developed by Fraunhofer ENAS on customer request.
Systems
| Miniaturized NIR/MIR spectrometer | Download |
| Miniaturized NIR/MIR spectrometer (Japanese) | Download |
| Miniaturized tunable band-pass filters for the infrared spectral range | Download |
| Miniaturized tunable band-pass filters for the infrared spectral range (Japanese) | Download |
| Nanostructured reflectors for tunable band-pass filters | Download |
| Nanostructured reflectors for tunable band-pass filters (Japanese) | Download |
| Gyrocompass | Download |
| Sensor integration with autarkic power supply into a simmering | Download |
| Grease sensor for condition monitoring of rolling bearings | Download |
| Grease sensor for condition monitoring of rolling bearings (Japanese) | Download |
| ASTROSE - Autarkic sensor network for condition monitoring of power lines | Download |
| Fully-integrated microfluidic cartridges for in-vitro diagnostics | Download |
| MRI-safe micro endoscope system with integrated ultrasonic function | Download |
| Vertically integrated array-type Mirau-based OCT system | Download |
| Vertically integrated array-type Mirau-based OCT system (Japanese) | Download |
| MEMS loudspeaker utilizing metallic glass membrane and deposited magnet | Download |
| Wake-up generator MEMS aluminum nitride based piezoelectric ultra-low power applications | Download |
Components
| Inertial sensors | |
| High precision +/- 10° inclination sensor | Download |
| Acceleration sensor element AC20kHz | Download |
| Acceleration sensor element ACS | Download |
| 2-axis 5G-accelerometer | Download |
| 2-axis 5G-accelerometer (Japanese) | Download |
| 2-axis acceleration sensor for medical applications | Download |
| Angular rate sensor FG5 | Download |
| Angular rate sensor FG6 | Download |
| Sensors | |
| Monolithic integrated 2D magnetic field sensors | Download |
| Monolithic integrated 2D magnetic field sensors (Japanese) | Download |
| Micromachined ultrasonic transducers (MUT) | Download |
| Capacitive micromachined ultrasonic transducers (CMUT) | Download |
| Multifunctional MEMS with ultrasonic transducer and temperature sensor | Download |
| Scaling up integration of carbon nanotubes into MEMS | Download |
| High-sensitive humidity sensors based on nanocomposites | Download |
| Flexible Parylene-based sensors for pH and gas detection | Download |
| Electro-optical transducer based on quantum dots | Download |
| Actuators | |
| Low actuation voltage RF MEMS switch for DC to 30 (70) GHz | Download |
| Actuators for active flow control | Download |
| Energy supply | |
| CCM/MEA manufacturing by inkjet printing process | Download |
| Printed thin film battery | Download |
| Printed thin film battery (Japanese) | Download |
| Smart universal power antennas for wireless energy transmission | Download |
| Communication | |
| Printed antennas | Download |
| Printed antennas (Japanese) | Download |
| Printed hybrid bluetooth low-energy label | Download |
Technologies
| Nanoimprint lithography | Download |
| Micro molding for micro and nano structured surfaces | Download |
| Atomic layer deposition and targeted application areas | Download |
| Atomic layer deposition and targeted application areas (Japanese) | Download |
| Technology platform for carbon nano devices | Download |
| Integration of carbon nanotubes and applications | Download |
| Integration of carbon nanotubes and applications (Japanese) | Download |
| Functional CNT films – absorption layers for IR applications | Download |
| Electro chemical deposition from ionic liquids | Download |
| Electro chemical deposition | Download |
| Aluminum nitride smart integration of thin film piezoelectrics in MEMS/NEMS | Download |
| Thin film encapsulation using 3d conformal Parylene® deposition | Download |
| Thin film encapsulation using 3d conformal Parylene® deposition (Japanese) | Download |
| Ultrashort pulse laser micromachining | Download |
Test
Simulation
System Integration & Packaging
| Direct bonding using chemical reactive plasma discharge (Japanese) | Download |
| Reactive bonding by using multi nano layer systems | Download |
| Reactive bonding by using multi nano layer systems (Japanese) | Download |
| Solid-liquid interdiffusion bonding (SLID) at wafer level | Download |
| Solid-liquid interdiffusion bonding (SLID) at wafer level (Japanese) | Download |
| Thermocompression wafer bonding with thin metal layers | Download |
| Thermocompression wafer bonding with thin metal layers (Japanese) | Download |
| Semi-finished bonded substrates | Download |
| Low-temperature adhesive bonding by using Parylene C | Download |
| 3D integration | |
| Interposer technologies and flexible substrates | Download |
| Silicon interposer for 3D sensor systems | Download |
| Silicon interposer for 3D sensor systems (Japanese) | Download |
| 3D integration: TSV processes and wafer thinning | Download |
| 3D Integration: TSV processes and wafer thinning (Japanese) | Download |
| Further technologies | |
| Ultra-thin and highly flexible Parylene-based PCB with multiple metallization layers | Download |
| Ultra high barrier thin film system | Download |
| 3D electronic systems | Download |
| Screen printing for MEMS packaging and wafer bonding | Download |
| Aerosol jet printing | Download |
| Aerosol jet printing (Japanese) | Download |
Annual Report
With our annual report we inform customers, journalists and a broad public about current topics and trends in the applied research and development of our institute.