Downloads

Welcome to the download area of the Fraunhofer-Institute for Electronic Nano Systems ENAS. Here you can download data sheets about the products and applications of Fraunhofer ENAS, information brochures about the institution as well as the annual report as pdf files.

On this page you can download data sheets from the Fraunhofer ENAS which address the topics sensor / actuators and systems, technology and testing. All information contained in the datasheets are preliminary and subject to change. Furthermore, the described systems, materials and processes are not commercial products. These are prototypes which can be further developed by Fraunhofer ENAS on customer request.

Systems

Miniaturized NIR/MIR-Spectrometer  Download
Miniaturized NIR/MIR-Spectrometer (Japanese) Download
Miniaturized turnable Band-Pass fllters for the infrared spectral range Download
Miniaturized turnable Band-Pass fllters for the infrared spectral range (Japanese) Download
Nanostructured refelctors for tunable band-pass filters Download
Nanostructured refelctors for tunable band-pass filters (Japanese) Download
Sensor Integration with Autarkic Power Supply into a Simmering Download
Grease Sensor for Condition Monitoring of Rolling Bearings Download
Grease Sensor for Condition Monitoring of Rolling Bearings (Japanese) Download
ASTROSE - Autarkic Sensor Network for Condition Monitoring of Power Lines Download
Fully-integrated microfluidic cartridges for in-vitro diagnostics Download
MRI safe micro endoscope system with integrated ultrasonic function Download
Vertically integrated array-type Mirau-based OCT system Download
Vertically integrated array-type Mirau-based OCT system (Japanese) Download
MEMS loudspeaker utilizing metallic glass membrane and deposited magnet Download
Wake-up generator MEMS aluminum nitride based piezoelectric ultra-low power applications Download

Components

inertial sensors  
High precision +/- 10° inclination sensor Download
Acceleration sensor element AC20kHz Download
2-axis 5G-accelerometer Download
2-axis 5G-accelerometer (Japanese) Download
2-axis acceleration sensor for medical applications Download
sensors  
Monolithic integrated 2D magnetic field sensors Download
Monolithic integrated 2D magnetic field sensors (Japanese) Download
Multifunctional MEMS with ultrasonic transducer and temperature sensor Download
Scaling up integration of carbon nanotubes into MEMS Download
High-sensitive humidity sensors based on nanocomposites Download
Electro-optical transducer based on quantum dots Download
actuators  
Low actuation voltage RF MEMS switch for DC to 30 (70) GHz Download
Actuators for active flow control Download
energy supply  
Printed thin film battery Download
Printed thin film battery (Japanese) Download
Smart universal power antennas for wireless energy transmission Download
communication  
Printed antennas Download
Printed antennas (Japanese) Download

Technologies

Nanoimprint lithography Download
Micro molding for micro and nano structured surfaces Download
Atomic layer deposition and targeted application areas Download
Atomic layer deposition and targeted application areas (Japanese) Download
Integration of carbon nanotubes and applications Download
Integration of carbon nanotubes and applications (Japanese) Download
Functional CNT films – absorption layers for  IR applications Download
Electro chemical deposition from ionic liquids Download
Electro chemical deposition Download
Aluminum nitride smart integration of thin film piezoelectrics in MEMS/NEMS Download
Thin film encapsulation using 3d conformal Parylene® deposition Download
Thin film encapsulation using 3d conformal Parylene® deposition (Japanese) Download
Ultrashort pulse laser micromachining Download

Test

MEMS active probe for wafer and chip level characterization of MEMS Download
MEMS parameter identifikation Download
Hermeticity characterization of packaged micro chips Download
Scanning acoustic microscopy Download
Mechanical characterization of the bonding strength Download

Simulation

Multi scale simulation of atomic layer deposition Download
Process and equipment simulation of chemical vapor deposition  Download
Device simulations for semiconductor industry and photovoltaics Download

System Integration & Packaging

bonding  
Direct Bonding using chemical reactive plasma discharge Download
Direct Bonding using chemical reactive plasma discharge (Japanese) Download
Reactive bonding by using multi nano layer systems Download
Reactive bonding by using multi nano layer systems (Japanese) Download
Solid-liquid interdiffusion bonding (SLID) at wafer level Download
Solid-liquid interdiffusion bonding (SLID) at wafer level (Japanese) Download
Thermocompression wafer bonding with thin metal layers Download
Thermocompression wafer bonding with thin metal layers (Japanese) Download
Semi-finished bonded substrates Download
3D integration  
Interposer technologies and flexible substrates Download
Silicon Interposer for 3D sensor systems Download
Silicon Interposer for 3D sensor systems (Japanese) Download
3D integration: TSV processes and wafer thinning Download
3D Integration: TSV processes and wafer thinning (Japanese) Download
further technologies  
Screen printing for MEMS packaging and wafer bonding Download
Aerosol jet printing Download
Aerosol jet printing (Japanese) Download