Fraunhofer Institute for Electronic Nano Systems
Fraunhofer Institute for Electronic Nano Systems

"Process, Device and Packaging Technologies"

"MEMS Technology Platforms"

 

Prof. Dr. Karla Hiller

Head of Group "MEMS/NEMS Technologies", "Deputy Ombudsperson"

Fraunhofer Institute for Electronic Nano Systems ENAS
Technologie-Campus 3
09126 Chemnitz

Telefon +49 371 45001-400