With the set up of the Fraunhofer Institute for Reliability and Microintegration (Fraunhofer IZM) a scientific team (project group) works under management of Prof. Michel in Chemnitz.
The department Micro Devices and Equipment managed by Prof. Gessner was established in Chemnitz. A strong cooperation exists between the Fraunhofer Institute for Reliability and Microintegration (Fraunhofer IZM Berlin, Munich & Chemnitz) and the Center for Microtechnologies of the Technische Universität Chemnitz.
January 1, 2006
Chemnitz Branch of Fraunhofer IZM was established with own cost unit.
Integration of Micro Materials Center Chemnitz and Advanced System Engineering were integrated into the Chemnitz Branch of Fraunhofer IZM.
Due to the positive development of the Chemnitz Branch, the Executive Board of the Fraunhofer Gesellschaft decided to put up a new building for the Chemnitz branch of the Fraunhofer IZM. The planning of the new building started in October 2006. The groundbreaking ceremony took place on November 5th, 2007.
The departments Back-End of Line and Printed Functionalities were founded.
July 1, 2008
The Chemnitz branch of Fraunhofer Institute for Reliability and Microintegration becomes Fraunhofer Research Institution for Electronic Nano Systems.
June 22, 2009
Opening of the new building of Fraunhofer ENAS.
Foundation of the department System Packaging.
Fraunhofer ENAS audit and recommendation for conversion into an institution.
January 1, 2011
conversion of the research institution into the Fraunhofer-Institute for Electronic Nano Systems ENAS