Data and Facts



With the set up of the Fraunhofer Institute for Reliability and Microintegration (Fraunhofer IZM) a scientific team (project group) works under management of Prof. Michel in Chemnitz.


The department Micro Devices and Equipment managed by Prof. Gessner was established in Chemnitz. A strong cooperation exists between the Fraunhofer Institute for Reliability and Microintegration (Fraunhofer IZM Berlin, Munich & Chemnitz) and the Center for Microtechnologies of the Technische Universität Chemnitz.

January 1, 2006

Chemnitz Branch of Fraunhofer IZM was established with own cost unit.

Integration of Micro Materials Center Chemnitz and Advanced System Engineering were integrated into the Chemnitz Branch of Fraunhofer IZM.

Due to the positive development of the Chemnitz Branch, the Executive Board of the Fraunhofer Gesellschaft decided to put up a new building for the Chemnitz branch of the Fraunhofer IZM. The planning of the new building started in October 2006. The groundbreaking ceremony took place on November 5th, 2007.


The departments Back-End of Line and Printed Functionalities were founded.

July 1, 2008

The Chemnitz branch of Fraunhofer Institute for Reliability and Microintegration becomes Fraunhofer Research Institution for Electronic Nano Systems.

June 22, 2009

Opening of the new building of Fraunhofer ENAS.

July 2009

Foundation of the department System Packaging.


Fraunhofer ENAS audit and recommendation for conversion into an institution.

January 1, 2011

conversion of the research institution into the Fraunhofer-Institute for Electronic Nano Systems ENAS

May 2012

Opening microFLEX-Center

April 2017

Beginning of preparatory measures of the enlargement construction incl. foundation.

July 2017

Beginning of the shell works for the annexe.

January 2019

Handing over of the annexe of the headquarters in Chemnitz.

April 2020

Renaming of the department Back-End of Line to Nano Device Technologies as a consequence of the current profile.