Fraunhofer Institute for Electronic Nano Systems

Fraunhofer ENAS - Your System and Technology Partner in the Field of Smart Systems Integration by using Micro and Nano Technologies

The particular strength of the Fraunhofer Institute for Electronic Nano Systems ENAS lies in the development of smart integrated systems for different applications. Fraunhofer ENAS develops single components, technologies for their manufacturing as well as system concepts and system integration technologies and transfers them into production. The institute offers research and development services from the idea, via design and technology development or realization based on established technologies up to tested prototypes.



Research Fab for quantum and neuromorphic computing: Launch of the Germany-wide coop-eration FMD-QNC

The Research Fab Microelectronics Germany - Module Quantum and Neuromorphic Computing (FMD-QNC) was launched on December 1, 2022.


Prof. Dr. Harald Kuhn becomes Chairman of the Advisory Board of IVAM Microtechnology Network

Prof. Dr. Harald Kuhn, Director of the Fraunhofer Institute for Electronic Nano Systems ENAS in Chemnitz, joins the scientific Advisory Board of the IVAM Microtechnology Network as new chairman.


Smart Systems Integration 2023: Call for Papers

The annual Smart Systems Integration Conference and Exhibition takes place March 28 – 30, 2023 in Bruges, Belgium. The submission for abstracts is open until November 7, 2023.





Recyclable food packaging: quality control for nanocoatings

In the RE-USE project, a team from four Fraunhofer institutes is developing an inline-capable measuring system that enables the coating process to be regulated and continuous quality control to be carried out during the coating of recyclable packages.


Fraunhofer ENAS extends cooperation with memsstar

Fraunhofer ENAS and memsstar Limited are partnering. In order to ensure the quality of the reactive ion etching processes in MEMS manufacturing and the throughput Fraunhofer ENAS works now with a fully remanufactured “Applied Materials Centura 5200” 200 mm plasma etching tool.



European Fuel Cell Project started

The German-Spanish-Czech consortium of the project IMMENSE met for kick-off at the Fraunhofer ENAS on July 8th, 2022. The project is focused on Proton Exchange Membrane Fuel Cells. This is one of the major types of fuel cells that offer various advantages.


Fraunhofer ENAS Research Award

Dr. Chris Stöckel has successfully established a microsystem platform (MEMS platform) based on piezoelectric aluminum nitride and receives the Fraunhofer ENAS Research Award for this. The focus of the development lies on systems and novel components based on future-oriented technologies, which significantly expand the state of the art with intelligent system integration and are tailored to the requirements of the respective users.



European CMP and WET users group meeting

The next European CMP and WET users group meeting will be held in Amsterdam on November 10-11, 2022.


Fraunhofer ENAS at Trade Fairs in 2022

Meet us at the following trade fairs and exhibitions in 2022:

COMPAMED in Duesseldorf/Germany |
Nov 14-17, 2022

SEMICON Europa in Munich/Germany |
Nov 15-18, 2022


36th Chemnitz Seminar

We cordially invite you to the Chemnitz Seminar "Reliability Methodology for Electronics Industry: Past – Present – Future" in Chemnitz on August 31, 2022.

Register online for a free participation.





High-Performance Center »Smart Production and Materials«


Research Fab Microelectronics Germany (FMD)


High-Performance Center »Functional Integration of Micro and Nanoelectronics«


Fraunhofer ENAS Annual Report and R&D Service Brochure