Fraunhofer Institute for Electronic Nano Systems

Fraunhofer ENAS - Your System and Technology Partner in the Field of Smart Systems Integration by using Micro and Nano Technologies

The particular strength of the Fraunhofer Institute for Electronic Nano Systems ENAS lies in the development of smart integrated systems for different applications. Fraunhofer ENAS develops single components, technologies for their manufacturing as well as system concepts and system integration technologies and transfers them into production. The institute offers research and development services from the idea, via design and technology development or realization based on established technologies up to tested prototypes.



Fraunhofer ENAS extends cooperation with memsstar

Fraunhofer ENAS and memsstar Limited are partnering. In order to ensure the quality of the reactive ion etching processes in MEMS manufacturing and the throughput Fraunhofer ENAS works now with a fully remanufactured “Applied Materials Centura 5200” 200 mm plasma etching tool.



Announcement Smart Systems Integration 2023 and Award Winners of the SSI2022

The annual Smart Systems Integration Conference and Exhibition will be held in Bruges, Belgium, March 28-30, 2023. The winner of the best Paper Award of 2022 has been selected.


European Fuel Cell Project started

The German-Spanish-Czech consortium of the project IMMENSE met for kick-off at the Fraunhofer ENAS on July 8th, 2022. The project is focused on Proton Exchange Membrane Fuel Cells. This is one of the major types of fuel cells that offer various advantages.




Fraunhofer ENAS Research Award

Dr. Chris Stöckel has successfully established a microsystem platform (MEMS platform) based on piezoelectric aluminum nitride and receives the Fraunhofer ENAS Research Award for this. The focus of the development lies on systems and novel components based on future-oriented technologies, which significantly expand the state of the art with intelligent system integration and are tailored to the requirements of the respective users.


ClassOne Technology and Fraunhofer ENAS to Collaborate on Hybrid Bonding for Advanced Imaging Devices

Fraunhofer ENAS and ClassOne Technolgy are partnering on hybrid bonding of high-density pixel arrays and CMOS devices, enabling creation of thin, compact final devices for advanced imaging or sensing end products. The work is carried out in Chemnitz.


Virtual Showroom

Discover the virtual showroom of the High-Performance Center  »Functional Integration in Micro and Nanoelectronics« and find out more about our competences and technologies.


Combining expertise in research and development for microelectronics in Saxony

Following a decision by the Executive Board of the Fraunhofer-Gesellschaft, the HighPerformance Center "Functional Integration for Micro/Nanoelectronics" is being funded for another three years. The center will receive annual funding of €1 million from the Fraunhofer Society for the period from 2022 to 2024.



36th Chemnitz Seminar

We cordially invite you to the Chemnitz Seminar "Reliability Methodology for Electronics Industry: Past – Present – Future" in Chemnitz on August 31, 2022.

Register online for a free participation.


APPLAUSE Heterogeneous Integration Summer School

We invite PhD students and young engineers to participate in the summer school on "Heterogeneous Integration" from 29 - 30 September 2022. It is organised by the partners of the ECSEL project APPLAUSE  and will take place in the framework of the ESREF - 33rd European Symposium on Reliability of Electron Devices Failure Physics and Analysis, in Berlin.


Fraunhofer Competence Forum China

Fraunhofer invites to the Fraunhofer Competence Forum China on April 14, 2022.

Within this webinar »Challenges and Opportunities of the Semiconductor Industry« Fraunhofer experts will present the innovative technologies of RISC-V based SoC Design, Fan-Out System Packaging, Electronic Integration and Packaging in the semiconductor field.




Fraunhofer ENAS at Trade Fairs in 2022

Meet us at the following trade fairs in 2022:


Farnborough Air Show in Farnborough/UK | Jul 18-22, 2022

COMPAMED in Duesseldorf/Germany |
Nov 14-17, 2022

SEMICON Europa in Munich/Germany |
Nov 15-18, 2022


Online Exhibition »NATUR - MENSCH - TECHNIK 2021« by Ines Escherich

The current exhibition of the Chemnitz photographer Ines Escherich shows photographs under the title "Nature - Human - Technology 2021".

Due to the current restrictions we show the exhibition online for the first time.



High-Performance Center »Smart Production and Materials«


Research Fab Microelectronics Germany (FMD)


High-Performance Center »Functional Integration of Micro and Nanoelectronics«


Fraunhofer ENAS Annual Report and R&D Service Brochure