Fraunhofer Institute for Electronic Nano Systems

Fraunhofer ENAS - Your System and Technology Partner in the Field of Smart Systems Integration by using Micro and Nano Technologies

The particular strength of the Fraunhofer Institute for Electronic Nano Systems ENAS lies in the development of smart integrated systems for different applications. Fraunhofer ENAS develops single components, technologies for their manufacturing as well as system concepts and system integration technologies and transfers them into production. The institute offers research and development services from the idea, via design and technology development or realization based on established technologies up to tested prototypes.



FMD and Intel join forces to accelerate research progress on 3D Heterogeneous Integration

Since July 2022, the Research Fab Microelectronics Germany (FMD) and Intel have been collaborating to champion and drive 3D heterogeneous integration R&D in Germany.


Prof. Dr. Harald Kuhn becomes Chairman of the Advisory Board of IVAM Microtechnology Network

Prof. Dr. Harald Kuhn, Director of the Fraunhofer Institute for Electronic Nano Systems ENAS in Chemnitz, joins the scientific Advisory Board of the IVAM Microtechnology Network as new chairman.


Smart Systems Integration Conference 2023: »Thomas Gessner Award«

Applications are open until February 17, 2023




Research Fab for quantum and neuromorphic computing: Launch of the Germany-wide coop-eration FMD-QNC

The Research Fab Microelectronics Germany - Module Quantum and Neuromorphic Computing (FMD-QNC) was launched on December 1, 2022.


Recyclable food packaging: quality control for nanocoatings

In the RE-USE project, a team from four Fraunhofer institutes is developing an inline-capable measuring system that enables the coating process to be regulated and continuous quality control to be carried out during the coating of recyclable packages.


Fraunhofer ENAS extends cooperation with memsstar

Fraunhofer ENAS and memsstar Limited are partnering. In order to ensure the quality of the reactive ion etching processes in MEMS manufacturing and the throughput Fraunhofer ENAS works now with a fully remanufactured “Applied Materials Centura 5200” 200 mm plasma etching tool.




ALPIN Workshop 2023

This year's workshop of the Atomic Layer Process Innovation Network (ALPIN) will take place on September 11th and 12th, 2023 at the Alte Aktienspinnerei in Chemnitz.


Bruker Seminar/Workshop

Fraunhofer ENAS and Bruker Nano Surfaces kindly invite you to this joint, one day Seminar & AFM Workshop in Chemnitz, Germany, on advanced surface metrology solutions for semiconductor, microelectronics, and photonic industries.


Fraunhofer ENAS at Trade Fairs in 2023

Meet us at the following trade fairs and exhibitions in 2023:


hy-fcell in in Stuttgart/Germany | September 13-14, 2023

Micro and Nano Engineering Conference in Berlin/Germany | September 25-28, 2023

BMT - Annual Conference on Biomedical Engineering in Duisburg/Germany | September 26-28, 2023





High-Performance Center »Smart Production and Materials«


Research Fab Microelectronics Germany (FMD)


High-Performance Center »Functional Integration of Micro and Nanoelectronics«


Fraunhofer ENAS Annual Report and R&D Service Brochure