Fraunhofer Institute for Electronic Nano Systems

Fraunhofer ENAS is part of Fab Microelectronics Germany (FMD)

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Fraunhofer ENAS - Your System and Technology Partner in the Field of Smart Systems Integration by using Micro and Nano Technologies

The particular strength of the Fraunhofer Institute for Electronic Nano Systems ENAS lies in the development of smart integrated systems for different applications. Fraunhofer ENAS develops single components, technologies for their manufacturing as well as system concepts and system integration technologies and transfers them into production. The institute offers research and development services from the idea, via design and technology development or realization based on established technologies up to tested prototypes.



Fraunhofer ENAS at Trade Fairs in Fall 2019

Fraunhofer ENAS will meet you at the following trade fairs and exhibitions:

IMTC 2019, Sept 18-19, in Chemnitz/Ger.
MST-Kongress 2019, Oct 28-30, in Berlin/Germany
AGRITECHNICA 2019, Nov 10-16, in Hanover/Germany
SEMICON Europa 2019, Nov 12-15, in Munich/Germany
COMPAMED/Medica 2019, Nov. 18-21, in Dusseldorf/Germany


Best Poster Award of Transducers 2019

A team of scientists from Fraunhofer ENAS and the Center for Microtechnologies (ZfM) at Chemnitz University of Technology received a Best Poster Award at the »Transducers 2019 – EUROSENSORS XXXIII« for the presentation of the topic »Piezoelectric scanning micromirror with large scan angle based on thin film aluminum nitride«. Katja Meinel from TU Chemnitz accepted the award on behalf of the entire team on June 27, 2019.



»MEMS Technologies and Applications«


We invite you to the CHEMNITZER SEMINAR »MEMS Technologies and Applications« from May 21-22, 2019, at the Fraunhofer ENAS in Chemnitz.



The new annual report is available now.

Find latest information about our strategy process, cooperations, events, facts and figures as well as selected research highlights of our business units »Micro and Nanoelectronics«, »Sensors and Actuators«, »Technologies and Systems for Smart Power and Mobility«, »Technologies and Systems for Smart Health« and »Technologies and Systems for Smart Production«.




Registration opened

Workshop »Air Pulses without Pressurized Air: Concepts – Technologies – Applications«

The workshop takes place in the Fraunhofer Forum Berlin and addresses the current status and reveals the potential of smart air and flow control using miniaturized and de-centralized devices.



First Time - Thomas Gessner Award at SSI2019 granted


At Smart Systems Integration Conference and Exhibition SSI 22019 for the first time the Thomas Gessner Award has been granted. The winner is Dr. Christian Huber, Robert Bosch GmbH Renningen.



Globalfoundries, Fraunhofer and Next Big Thing found start-up in Dresden

Sensry enables small and medium-sized businesses to gain access to innovative semiconductor technologies


13th Fraunhofer Symposium in Sendai

Smart Society 5.0 and Industry 4.0


April 15, 2019 

It is organized by Fraunhofer ENAS (Germany) in cooperation with the Fraunhofer Project Center »NEMS/MEMS devices and manufacturing technologies at Tohoku University«, the Fraunhofer Office Japan in Tokyo and the Micro System Integration Center, Tohoku University.



Minapim 2018 in Manaus

On December 3 and 4, 2018, the
MINAPIM - Micro and Nanotechnology and Photonics Interconnection for the Market - took place for the 7th time in Manaus, Brazil.






Successful Cooperation with Tohoku University Sendai is being continued

On December 17, 2018, the continuative contract between Tohoku University Sendai and Fraunhofer-Gesellschaft for the continuation of the Fraunhofer ENAS Project Center “NEMS/MEMS devices and manufacturing technologies at Tohoku University” was signed.


Thomas Gessner Award

At Smart Systems Integration Conference SSI2019 the Thomas Gessner Award will be granted first time. Interested scientists are invited to submit their documents in digital form until February 1, 2019.


Fraunhofer ENAS Research Award 2018

Dr. Lutz Hofmann received the research award of Fraunhofer ENAS in 2018. With his research results on 3D integration and copper-filled through silicon vias in microsystems, he contributed to the expert status of the Fraunhofer Institute for Electronic Nano Systems ENAS in Chemnitz as one of the few research institutes in this field.



New Office Building for Fraunhofer ENAS

On December 5, 2018, the Fraunhofer-Gesellschaft handed over the keys for the new office building to Fraunhofer ENAS.