Micro and Nano Devices
The size effect of copper interconnect in nanoscale based on various scattering mechanisms including surface roughness reflection, surface electron–phonon scattering, grain boundary and background scattering is studied theoretically using Monte Carlo method as a statistical solution to Boltzmann Transport Equation.
Surface phonon dispersion and corresponding scattering probability are calculated from first principle calculations based on density functional perturbation theory.
The performed simulation to investigate the influence of linewidth on resistivity shows a good agreement with published experimental results.
A comparison of the resistivity behavior of quasi elastic and inelastic surface model reveals surface electron–phonon scattering is an effective energy-loss channel of electrons.