Demonstrators and Prototypes

Smart systems consist of different components. The following demonstrators and prototypes have been developed and may be further developed on customer demand.


High-precision silicon-based inertial sensors

  • Gyroscopes
  • Acceleration sensors
  • Inclination sensors
  • Vibration sensors



  • Switches
  • Varactors


Ultra-low power MEMS

  • Wake-up MEMS


Optical sensors / MOEMS

  • Fabry-Pérot filters
  • Optical grating
  • Controllable detectors
  • Optical sensors
  • Quantum dot-based systems


Pressure and force transducers

  • Ultrasonic transducer
  • MEMS loudspeaker
  • Pressure sensitive resonators


CNT-based systems

  • CNT FETs for nanoelectronics and sensors
  • MEMS with integrated CNTs (e. g. test platform for reliability analysis)
  • Pressure sensor
  • High-frequency FETs for analog wireless applications


Magnetic field sensors (GMR- and TMR-based)

  • 2D compass sensor
  • Magnetic marker detection in fluids


Printed components

  • Printed batteries
  • Printed antennas (smart labels)


Material and structural sensors

  • Nanocomposite-based systems
  • Acceleration sensors
  • Acoustic emission sensors
  • Humidity sensor
  • Sensors for mechanical and thermomechanical load



  • Microfluidic systems for liquid samples
  • Gas fluidic actuators (SJA / PJA)