Infrastructure

Fraunhofer ENAS maintains a close cooperation with the Chemnitz University of Technology especially with the Center for Micro and Nano Technologies (ZfM) of the Faculty of Electrical Engineering and Information Technology and with the Faculty of Mechanical Engineering. Both facilities share their infrastructure including laboratories, clean rooms and equipment.

 

Clean rooms

The building of Fraunhofer ENAS possesses 1400 m² of laboratories including 380 m² of improved cleanness.

The ZfM facilities include a 1000 m² cluster of clean rooms (300 m² of them are class ISO 4). Modern equipment is installed for processing wafers as well as design and testing laboratories.

• Substrates                            
  • Size:                150 mm, 200 mm
  • Material:          silicon, glass (on request: ceramics, lithium niobate, lithium tantalate, sapphire, silicon carbide and germanium)