Business Units

Micro and nanoelectronics is one of the key enabling technologies of the 21st century. The ongoing downscaling (More Moore), the integration of different functionalities (More than Moore) as well as the development of possible future technologies beyond the CMOS scaling limits (Beyond CMOS) are the ongoing development trends. The business unit micro and nanoelectronics is focusing especially on the following topics:

Processes and technologies for micro and nanoelectronics with the focus on back-end of line and interconnects

Modeling and simulation of technological processes, equipment and devices

Beyond CMOS and RF devices, integrated circuits and technologies

Packaging and (heterogeneous) integration (2D, 2.5D, 3D) for electronic devices

Electromagnetic and thermomechanic characterization and reliability evaluation