Micro and Nanoelectronics

Modeling and simulation of technological processes, equipment and devices

Experimental developments are supported by the simulation of processes and equipment (PVD, CVD, ALD, ECD). Furthermore, device simulation and modeling of CMOS and nano devices (i.e. CNT FETs) as well as blackbox modeling and event-driven modeling and simulation are realized.

Key aspects


Simulation of devices


Simulation of processes and equipment


Modeling and simulation methods for efficient and full system characterization