Modeling and simulation of technological processes, equipment and devices

CMP Pressure distribution and padcontur

Micro and Nanoelectronics

Modeling and simulation of technological processes, equipment and devices

Experimental developments are supported by the simulation of processes and equipment (PVD, CVD, ALD, ECD). Furthermore, device simulation and modeling of CMOS and nano devices (i.e. CNT FETs) as well as blackbox modeling and event-driven modeling and simulation are realized.

Key aspects

 

Simulation of devices

 

Simulation of processes and equipment

 

Modeling and simulation methods for efficient and full system characterization