Sensor and Actuator Systems


Application examples and scenarios


On-line stress measurement during manufacturing and in field-testing with the stress chip


Virtual Prototyping for fast design of universal sensor platforms


Automated virtual prototyping of reconfigured FOWLP wafers


TSV reliability


Thermo-mechanic excitation of encapsulated MEMS components


In situ stress monitoring using a stress chip


UNSETH: process and reliability assessments of integration and packaging technologies providing hardware-based security