Sensor and Actuator Systems

Reliability

Application examples and scenarios

 

On-line stress measurement during manufacturing and in field-testing with the stress chip

 

Virtual Prototyping for fast design of universal sensor platforms

 

Automated virtual prototyping of reconfigured FOWLP wafers

 

TSV reliability

 

Thermo-mechanic excitation of encapsulated MEMS components

 

In situ stress monitoring using a stress chip

 

UNSETH: process and reliability assessments of integration and packaging technologies providing hardware-based security