Fraunhofer Institute for Electronic Nano Systems
Sensor and Actuator Systems
The business unit comprises manifold sensor and actuator systems, which are based on different technologies and transducer principles as well as procedures, methods and sensor technologies for material and structural analysis. The prospective focus lies on an increasing integration of nanostructures. The following topics are addressed:
Inertial sensors
Optical systems/MOEMS
Electromagnetic sensors
Pressure and power transducer
Material and structure sensors