Business Units

Sensor and Actuator Systems

The business unit comprises manifold sensor and actuator systems, which are based on different technologies and transducer principles as well as procedures, methods and sensor technologies for material and structural analysis. The prospective focus lies on an increasing integration of nanostructures. The following topics are addressed:

 

Inertial sensors

Optical systems/MOEMS

Electromagnetic sensors

Pressure and power transducer

Material and structure sensors

The business unit comprises manifold sensor and actuator systems, which are based on different technologies and transducer principles as well as procedures, methods and sensor technologies for material and structural analysis. The prospective focus lies on an increasing integration of nanostructures. The following topics are addressed:


Inertial sensors || This topic focuses on the development of high precision silicon-based sensors for measuring acceleration, vibration, inclination and angular rate. The value chain, starting with the design of the MEMS or system, the development of technologies as well as the manufacturing of prototypes, followed by the characterization and testing of the system, is fully covered.


Optical systems/MOEMS |
| Optical systems/MOEMS are well-established silicon-based systems, i.e. variable frequency optical filters and shutters based on optical Bragg reflectors which are complemented by light sources and detectors. Furthermore, quantum dot-based LED and photo detectors enable customer specific spectral sensors, material integrated light sources as well as design and display devices.


Electromagnetic sensors || Multi-dimensional magnetic sensors based on the GMR and TMR effect, respectively, while using ferromagnetic thin films, are in the focus of this topic. However, they can be applied both in the direct measurements of magnetic fields and in the measurement of distance, position and rotation. Furthermore, sensors for near field measurements of electromagnetic fields and determination of radiation characteristics were developed.


Pressure and power transducer ||
Silicon-based ultrasonic transducer and ambient pressuresensitive resonators as well as MEMS loudspeaker are developed. Speakers are based on novel materials and technologies, i.e. sputtered metallic glass and printed permanent magnetic layers.


Material and structure sensors ||
This topic includes methods, techniques and arrangements for material and structure sensors. The sensors for mechanical strain, stress and overload (detection of cracks) are based on silicon technologies. Nano composite-based overload sensors as well as humidity sensors are using thin layers of organic materials with embedded nano particles enabling the integration into fiber-reinforced composites. Another approach are sensors based on carbon nanotubes.

Subject overview

Inertial sensors

Optical systems/MOEMS

Electromagnetic sensors

Pressure and power transducer

Material and structure sensors