Business Units

Sensor and Actuator Systems

The business unit comprises manifold sensor and actuator systems, which are based on different technologies and transducer principles as well as procedures, methods and sensor technologies for material and structural analysis. The prospective focus lies on an increasing integration of nanostructures. The following topics are addressed:

 

Inertial sensors

Optical systems/MOEMS

Electromagnetic sensors

Pressure and power transducer

Material and structure sensors

Topics

 

Inertial sensors

 

Optical systems/MOEMS

 

Electromagnetic sensors

 

Pressure and power transducer

 

Material and structure sensors

 

Packaging and (heterogeneous) integration (2D, 2.5D, 3D)

 

Test and electromagnetic and thermomechanic characterization and reliability evaluation