Sensor and Actuator Systems

Electromagnetic sensors

Multi-dimensional magnetic sensors based on the GMR and TMR effect, respectively, while using ferromagnetic thin films, are in the focus of this topic. However, they can be applied both in the direct measurements of magnetic fields and in the measurement of distance, position and rotation. Furthermore, sensors for near field measurements of electromagnetic fields and determination of radiation characteristics were developed.

Application examples and scenarios


Spintronics: Laser Annealing for Local Crystallization of TMR Sensors


Spintronic Sensors for Magnetic Microbeads Detection


XMR sensor operating at MHz sampling rates


Near field electromagnetic sensors


Monolithically integrated 2D magnetic field sensors based on GMR spin valves