Inertial sensors

Sensor and Actuator Systems

Inertial sensors

This topic focuses on the development of high precision silicon-based sensors for measuring acceleration, vibration, inclination and angular rate. The value chain, starting with the design of the MEMS or system, the development of technologies as well as the manufacturing of prototypes, followed by the characterization and testing of the system, is fully covered.

Application examples and scenarios

 

Intense2020 – Development of robust acceleration sensors for automotive applications

 

Thermo-mechanic excitation of encapsulated MEMS components

 

Aluminum nitride – innovative piezoelectric MEMS transducer

 

High-performance MEMS gyroscope

 

Cu-TSV for MEMS based on a via last approach

 

Temporary wafer bonding for MEMS devices

 

Direct integration of strain-sensitive field effect transistors for NEMS

 

Piezoelectric low-power MEMS with aluminum nitride