© Fraunhofer ENAS

Pressure and Power Transducer#

Sensor and Actuator Systems

Pressure and power transducer#

Silicon-based ultrasonic transducer and ambient pressure-sensitive resonators as well as MEMS loudspeaker are developed. Speakers are based on novel materials and technologies, i.e. sputtered metallic glass and printed permanent magnetic layers.

Application examples and scenarios#

CNT based force sensors: Process Monitoring in forming tools

PMUT – a new generation of ultrasonic transducers

Aluminum nitride – innovative piezoelectric MEMS transducer