Pressure and Power Transducer

Sensor and Actuator Systems

Pressure and power transducer

Silicon-based ultrasonic transducer and ambient pressure-sensitive resonators as well as MEMS loudspeaker are developed. Speakers are based on novel materials and technologies, i.e. sputtered metallic glass and printed permanent magnetic layers.

Application examples and scenarios

 

PMUT – a new generation of ultrasonic transducers

 

Aluminum nitride – innovative piezoelectric MEMS transducer

 

Temporary wafer bonding for MEMS devices