Sensor and Actuator Systems

Pressure and power transducer

Silicon-based ultrasonic transducer and ambient pressure-sensitive resonators as well as MEMS loudspeaker are developed. Speakers are based on novel materials and technologies, i.e. sputtered metallic glass and printed permanent magnetic layers.

Application examples and scenarios


CNT based force sensors: Process Monitoring in forming tools


PMUT – a new generation of ultrasonic transducers


Aluminum nitride – innovative piezoelectric MEMS transducer