Multi Device Integration

The strategic direction of the Multi Device Integration Department is focused on the integration of NEMS/MEMS into functional modules and the development of NEMS/MEMS using silicon based and non‐silicon materials (nanocomposites, ceramics and polymers).

In terms of Smart Systems Integration, the department combines primarily the activities in the areas of:

  • MEMS/NEMS Design,
  • Electronics Design,
  • Microoptics,
  • Fluidic Integration,
  • Nanocomposites,
  • RF‐MEMS,
  • Measurement, Test and Characterization,
  • System Integration.

The aim of the research is to develop and apply integration technologies under the selection of different materials and components, to provide products which are able to fulfill the users’ needs under different conditions by means of intelligent system integration.