nano micro biz 2015

Fraunhofer ENAS presents selected technologies and research samples of MEMS and NEMS at the nano micro biz 2015 in Yokohama, Japan.

For the first time, Fraunhofer ENAS shows a MEMS loudspeaker with a membrane of a thin layer of metallic glass. Due to their amorphous microstructure, metallic glasses exhibit superior mechanical properties in comparison to crystalline materials. It can be deposited with standard micro technology processes.

The institute also shows the following MEMS actuators:

• RF switch
  
• Fabry-Pérot interferometer
• Synthetic jet actuator for active flow control 

Furthermore, the researchers introduce a monolithic manufactured 2D GMR sensor.

Research samples of the development of the following technologies are exhibited, too:

• Aerosol-jet printing
• Wafer bonding by reactive multilayer systems
  
• Laser micromachining  

Presentation:

Joerg Froemel, Fraunhofer ENAS, talks about current researches in his presentation at the 21th International Micromachine Nanotech Symposium:

„MEMS devices enabled by material innovation”

Joerg Froemel, Fraunhofer ENAS

April 22, 2015

4:05 p.m. – 4:25 p.m., Annex Hall F 203

The 21st International Micromachine Nanotech Symposium
Advanced MEMS ＆ Sensor Technologies for Future Industry Growth
presented by Micromachine Center