Fraunhofer Institute for Electronic Nano Systems
In the EU project “GENESIS – Generate in Europe a Sustainable Industry for Semiconductor,” Fraunhofer ENAS is making chip production more sustainable. Our subproject develops digital twins for Chemical-Mechanical Planarization (CMP) to significantly reduce resource consumption and emissions – through less slurry, fewer pilot wafers, and lower energy use. In this way, we support climate-friendly, efficient semiconductor manufacturing in Europe and contribute to the goals of the European Chips Act.
The Fraunhofer ENAS approach combines physics, data, and AI into robust, adaptive process models. Together with industry and research partners, we test the solutions under real manufacturing conditions and translate them into industrial practice. The result: faster process development, less scrap, and a measurable contribution to a sustainable European semiconductor value chain – with transferability to additional process steps.