Novel process chain for the fabrication of variably oriented lattice structures using ion beam etching on different substrates – AziTrim

© Fraunhofer ENAS
Lattice structures in a waveguide for AR applications

The goal of the AziTrim project is the further development and optimization of a process chain for the production of variably oriented lattice structures for use in augmented reality (AR) applications. The project is based on the ion-beam trimming process of a scia Trim 200 system, which provides the basis for a demonstrator. The focus of the work is the simulation-based development of an innovative fine-beam ion source operated with inert and reactive gases. By combining the ion-beam source with a novel 5-axis system, elaborate masking and handling processes are eliminated, ensuring an efficient process. Furthermore, this creates additional degrees of freedom for the design of waveguides in AR applications.

Our project partners:

  • LSA GmbH, Wolkenstein (coordinator)
  • scia Systems GmbH, Chemnitz

Project duration: May 15, 2025 – December 31, 2027