Fraunhofer Institute for Electronic Nano SystemsThe precise detection of the smallest movements in MEMS inertial sensors is intended to be significantly improved in this project through detection approaches based on optical wave effects. Particularly for gyroscopes, a significant development boost is expected for solutions based on integrated photonic components, to which the project partners Fraunhofer ENAS and Chemnitz University of Technology want to contribute with theoretical and technological preliminary work.
We bring in a proven M(O)EMS expertise, starting from concept and sizing through the technological possibilities of nanostructuring, wafer-level processing, and encapsulation to characterization, as well as extensive preliminary work into this project. The objective is to explore innovative optomechanical coupling of optical resonators with MEMS resonators and to investigate it in terms of theoretical and actual achievable performance (sensitivity). The mechanical movements cause a detuning of the optical resonator, where high quality factors result in a large signal amplification. Optomechanical structures are designed, and an Opto-MEMS technology with wafer-level integrated photonic components (e.g., waveguides, grating couplers, ring resonators) is developed, and the implementation is demonstrated using laboratory samples.
Thus, the foundations are laid for novel Opto-MEMS with a wide range of applications, such as navigation systems for autonomous driving, robotics, or satellites, and high-precision gravimetric sensors. Thereby, the project makes a significant contribution to enhancing the innovative power of photonics in Germany.