Yokohama/Japan  /  April 23, 2014  -  April 25, 2014

nanomicrobiz 2014

hall D, Booth S-23

Fraunhofer ENAS and the Fraunhofer Project Center ‘NEMS/MEMS Devices and Manufacturing Technologies at Tohoku University’ attend together with the Gessner Group of WPI-AIMR, Tohoku University, in the nanomicro biz 2014.

The Fraunhofer researchers show joint developments low-temperature bonding processes, e.g. SLID wafer bonding. Among others, they show a Fabry Perot etalon manufacturing by SLID bonding. Also a NIR MEMS spectrometer is presented and application opportunities are demonstrated.

The Fraunhofer Project Center was founded in Sendai in 2012. It offers R&D for advanced fabrication technologies and new materials for smart systems, NEMS/MEMS, semiconductor wafer bonding, system integration technologies and technology transfer. The Project Center in Sendai is led by Professor Masayoshi Esashi and Professor Shuji Tanaka from Tohoku University as well as Professor Thomas Gessner from Fraunhofer ENAS.

The researchers of the Gessner Group of WPI-AIMR, Tohoku University, introduce micro mirrors manufactured by metallic glass and nanoporous materials, like nanoporous gold, for low-temperature bonding.


Apr 23, 2014, 1:40 – 2:00 pm
Smart Monitoring Systems
Prof. Dr. Thomas Gessner
in the IVAM Special Session (Annex Hall F 203)
20th International Micromachine Nanotech Symposium