Inertial Sensors

Fraunhofer ENAS develops micromechanical accelerometers with parameters that are adapted to the specific application. These include, for example, developments for the use of acceleration sensors in medical implants. The challenge is to design sensors with very small dimensions while maintaining high sensitivity. This is mainly achieved by a correspondingly large aspect ratio.

We have developed sensors for instance for pulse detection, monitoring of patient positioning or controlling the position of implants. The sensors are manufactured in close cooperation with the Center for Microtechnologies (ZfM) at Chemnitz University of Technology. Using the so-called BDRIE technology, the sensors are featured by a high aspect ratio. Electrode structures are etched up to 100 µm in depth. The sensitivity is increased by small distances between the electrodes. This makes it possible to realize particularly small and sensitive sensor elements. The acceleration sensors can resolve movements in the picometer range. Biocompatible packaging and surface nano structuring complete the research on implantable systems at Fraunhofer ENAS.

A large number of different MEMS elements for the detection of accelerations have been developed in several projects. With the help of demonstrators, the sensor systems were characterized and the required parameters were verified. Technical information can be found under »Downloads«.