Automatic AFM (Atomic Force Microscope)



Bruker InsightCAP
Using AFM, surface structures and properties can be depicted at the nm and sub-nm scale.
In general, in an atomic force microscope, a microscopic tip with a tip radius of ~10-50 nm is attached to a cantilever. When the tip is brought close to the examined surface, an attractive or repulsive interaction between the surface and the tip occurs. The force is transferred through the tip to the cantilever, causing the cantilever to deflect. Using piezo crystals, the tip can be moved in all three spatial directions, enabling the scanning of surfaces in a grid-like manner.
The Bruker InsightCAP is a fully automatic AFM. This allows high measurement throughput, statistical process control and comprehensive analysis of production batches.
The InsightCAP features the following:
- Automatic measurement system for 4", 6" and 8" wafers
- Recipe-based automatic measurements, including mark recognition, the measurement itself and also automated evaluation
- High accuracy and repeatability
- Integrated tip management / qualification system, allowing the continuous monitoring of the tip condition, even in case of a high measurement volume
- Wide range of tips and measurement methods facilitate a broad area of application
- Tapping mode
- Profiling
- Topography mode
- Critical dimension (CD)