Fraunhofer Institute for Electronic Nano Systems
The international trade fair nano micro biz (formerly: Micromachine/MEMS Exhibition) 2013 will be in Tokyo Big Sight from July 3 to 5, 2013. The Fraunhofer Institute for Electronic Nano Systems will introduce there latest research topics on booth D-31 in hall 2.
It is demonstrated technology solutions for 3D integration and various research results of low-temperature bonding. Fraunhofer ENAS shows MEMS for high-precision applications and for the high frequency range. In addition to the silicon components, the Fraunhofer ENAS developed polymer-based solutions such as acceleration or humidity sensors.
The Gessner research group of the WPI-AIMR at the Tohoku University in Sendai will exhibit current research results in metallic glass for micro mirrors and nanoporous gold as a material for wafer bonding.
presentation:
Thursday July 4, 2013
10:30 - 11 a.m.
3D integration for Smart Systems
Prof. Thomas Gessner, director of the Fraunhofer ENAS
6th Japanese-German Micro/Nano Business Forum in the East Hall
Here you can find the complete program of the Forum and a free admission tickets for the nano micro biz enclosed.
exhibits: