Chemnitz/Germany  /  October 23, 2012  -  October 24, 2012

11th Chemnitz Symposium Microsystemtechnologies

- Micromechanics & Microelectronics -

On October 23 and 24, 2012, will be held the 11th regional Symposium on Microsystem Technologies. The series of conferences started already in 1992. The event is organized by Prof. Mehner and Prof. Herrmann of the Chemnitz University of Technology. The symposium will inform about developments and research in both fields of microsystem technology, microelectronics and micromechanics. At the meeting, the Center for Microtechnologies (ZfM) and the Fraunhofer Institute for Electronic Nano Systems ENAS involved as centers of excellence.

In the accompanying exhibition, the Fraunhofer ENAS presents jointly with the Center for Microtechnologies an autonomous sensor system for monitoring of power lines.

October 24, 2012

Session 4: Materials, reliabilities

10:30-10:50 a.m.
"High-precision determination of mechanical stresses in electronic and MEMS components by a stress test chip" Schindler Saefkow, F. Otto, A., Faust, W., Wunderle, B. Michel, B. Rzepka, S. Fraunhofer ENAS , Micro Materials Center, Chemnitz, Berlin Nanotest and Design GmbH, Chemnitz

Session 5: Measurement, Technology

11:10-11:30 a.m.

"Innovative characterization platform for the evaluation of thermal interface materials (TIM)" AboRas, M. Wunderle, B. Schacht, R., May, D., Winkler, T., Michel, B., Berlin Nanotest and Design GmbH, Berlin, Fraunhofer ENAS, Micro Materials Center, Chemnitz, Chemnitz University of Technology, University of Lausitz (FH), Senftenberg

11:30-11:50 a.m.

"Strength Analysis of thermokompressionsgebondeten sensor structures on wafer level" Vogel, K. Baum, M. Roscher, F. Rank, H. Mayer, T., Wiemer, M. Gessner, T. Fraunhofer ENAS, Chemnitz, Chemnitz , Robert Bosch GmbH

11:50 a.m - 12:10 p.m.
"Field-emitting carbon nanotubes in MEMS structures for movement sensors" Loschek, S. Hermann, S. Haibo, Y. Schulz, SE TU Chemnitz, Center for Microtechnologies

12:30-12:50 p.m.
"Laser-Based Multi-layer assembly process to generate heterogeneous and pressure-resistant microfluidic systems" Geidel, S., Enderlein, T.; Morschhauser, A. Nestler, J., Otto, T., Gessner, T. Fraunhofer ENAS, Multi Device Integration, Chemnitz, Chemnitz University of Technology, Center for Microtechnologies

Session: Research Unit 1713, TU Chemnitz

10:10-10:30 a.m.
"Wafer level approaches for the integration of carbon nanotubes in electronic and sensor applications" Hermann, S.; Loschek, S. Fiedler, H., Haibo, Y., Bonitz, J. Schulz, SE Gessner, T.

10:30-10:50 a.m.
"Design of various test stages for SWNT properties investigation on wafer level" Schondelmaier, G. Hartmann, S.; Shaporin, A., Hiller, K. Mehner, J. Wunderle, B.

11:30-11:50 a.m.
"Nanoscale simulations of carbon nanotubes for NEMS" Wagner, C. Schuster, J., Gessner, T.

11:50 a.m.-12:10 p.m.
"System level modeling of CNT based mechanical sensor" Kolchuzhin, V. Shende, MA; Markert, E. Wagner, C., Heinkel, U. Mehner, J., Gessner, T.

12:10-12:30 p.m.
"Investigation of piezoresistive effect in MOS transistors for use in integrated MEMS sensors" Haas, S. Schramm, M. Heinz, S.; Loebel, K.-U.; Reuter, D.; Bertz, A. , Gessner, T. Horstmann, JT

12:30-12:50 p.m.
"LoC integration strategies rolled sensors" Harazim, S. Helke, C., Enderlein, T. Nestler, J., Otto, T., Gessner, T.

"Development and characterization of a high precision vibratory MEMS gyroscope system with low-noise integrated readout and control electronics" Köhler, D., Hiller, K.; Forke, R.; Konietzka, S. Pohle, A.; Billep, D ., Heinz, S., Lange, A., EDC Electronic Design Chemnitz GmbH, Fraunhofer ENAS Chemnitz, Chemnitz University of Technology, Center for Microtechnologies