Grenoble/France  /  October 07, 2014  -  October 09, 2014

SEMICON Europa 2014

First time SEMICON Europa takes place in Grenoble/France. New is the annual change of venues between the two largest European microelectronics clusters Grenoble and Dresden.

From October 7 to 9, 2014 equipment manufacturers and suppliers to the semiconductor, industry engineers and scientists come together to inform themselves on innovations in microelectronics and microsystems technology. An extensive program on topics such as semiconductors, test, MEMS, packaging, electronic components and printed electronics makes the event to a comprehensive platform for exchange of innovations and trends.

At the joint booth of the Fraunhofer-Group for Microelectronics, Fraunhofer ENAS shows the latest developments in 3D integration, printed functionalities, packaging on wafer level as well as energy-efficient sensors and systems at selected exhibits.






Workshop on Atomic Layer Deposition
Room Les Bans, ALPEXP

Tuesday, October 7, 2014, 11:05 am
ALD of Metals and Metal Oxides for Advanced Interconnect and Sensor Technology: In-Situ Investigations for the ALD of Copper
Stefan E. Schulz, Fraunhofer ENAS

MEMUNITY MEMS Testing and Metrology Workshop
Room Les Bans, ALPEXPO

Tuesday, October 7, 2014, 5:40 pm
Fast measurement of dimensions and material parameters of MEMS using SLDV
Marco Meinig, Fraunhofer ENAS

Wednesday, October 8, 2014, 9:30 am
Advanced mechanical stress assessment on MEMS components to meet reliability demands
Dr. Dietmar Vogel, Fraunhofer ENAS

Wednesday, October 8, 2014, 12:00 am
Improved RF design through precise 3D near field scanning measurement techniques
Dr. Christian Hedayat, Fraunhofer ENAS



At the postersession Advanced Packaging Conference Dr. Dietmar Vogel, Fraunhofer ENAS presents "Advanced Stress Analysis on TSV Structures" on October 7, 2014.


Workshops und Foren:

International MEMS Industry Forum
October 6/7, 2014
Registration: International MEMS Industry Forum

MEMUNITY MEMS Testing and Metrology Workshop
October 7/8, 2014
Registration: MEMUNITY Workshop