Miniaturized tunable Fabry-Pérot filter

The tunable Fabry-Perot interferometer provides high accuracy, very good parallelism of reflectors already without closed-loop operation, mechanical robustness and typical microsystem properties like small size and light weight.

The tunable IR filter can be used for:

  • measurements in the range of 3 - 5 µm, 5 - 8 µm and 8 - 11 µm
  • gas concentration measurement
  • spectral imaging

The tunable infrared filter was developed and built up in cooperation with InfraTec Dresden GmbH.