Bruker Seminar/Workshop  /  July 05, 2023

Advanced Surface Metrology Solutions for SEMI-MEMS & Photonic Applications

Fraunhofer ENAS and Bruker Nano Surfaces kindly invite you to this joint, one day Seminar & AFM Workshop in Chemnitz, Germany, on advanced surface metrology solutions for semiconductor, microelectronics, and photonic industries.

The focus of the seminar is to provide new insights into surface characterization and analysis techniques, from the μm to nm scale, in applications ranging from process control, to failure analysis and R&D. The following techniques will be covered:

  • Industrial Atomic Force Microscopy (AFM)
  • White Light Interferometry (WLI)
  • Photothermal AFM-IR
  • Nanomechanical Metrology
  • Multiple-Angle Reflectometry

In the afternoon hands-on session, we will demonstrate how to set up automated AFM measurements on the Dimension ICON PRO300, accurately measure surface roughness and step height, and how to master deep narrow trenches and holes using PeakForce DT Probes.

You can also schedule an individual demonstration and have your own sample measured on the Dimension ICON PRO300 AFM and/or ContourX-500 WLI in the afternoon session or the following day.

Please book your individual demonstration by contacting As availability is limited, we suggest you pre-book in advance.


Program flyer and agenda