We will be exhibiting our research and development results in the field of nanotechnologies and intelligent sensor systems at nano tech and MEMS Sensing and Network System 2024 in Tokyo.
You will find us at the German Pavilion in the East Hall 5 at booth 5L-03J. There we will show development examples on the following topics:
- Technology platform for carbon nano devices
- Fabrication of nanoimprint lithography masters for photonic applications
- Technologies for wafer-level bonding and packaging
- Parylene-CVD for various applications
- Piezoelectric and capacitive micromachined ultrasonic transducer
- System for energy-autonomous vibration detection