The MicroProf® TL is an optical surface measurement tool for fully automated 3D surface metrology in a variety of applications such as PCB design and simulation, 3D-IC, MEMS, stacked wafers and fault analysis among others. At the Fraunhofer pavilion, the equipment manufacturer FRT GmbH presents such a measurement tool as the latest member within the MicroProf® series.

The special feature of the MicroProf® TL is the thermo unit with a fully integrated heating and cooling plate. The temperature ranges from 10 °C (or -80 °C for liquid nitrogen cooling) to 400 °C, with fast heating/cooling rates and uniform temperature distribution over the sample surface. In addition to the topography measurements, the system can be extended by the microDAC® TL, a 2,5D deformation sensor from Chemnitzer Werkstoffmechanik GmbH. The high-precision camera set-up allows the measurement of global and local deformation fields with an accuracy of up to 50 nm. With the MicroProf® TL, it is therefore possible to characterize both lateral and vertical sample deformation under thermal load with the highest resolution of the measured value. Thus, this is the basis for determining the component behavior under working conditions and for simulating various process steps.

Fraunhofer ENAS is a referee lab and uses the obtained data to verify the simulations and to optimize the simulation models. Furthermore, the institute provides a catalog of requirements for the measurement set-up, which is further developed within the EU project TRACE.

The MicroProf® TL, as an innovative, adaptable and reliable system solution developed together with our cooperation partners, is one contribution of Fraunhofer ENAS within the scope of the Research Fab Microelectronics Germany. The ever-increasing complexity of microelectronic systems poses an enormous challenge for the design and the manufacturing of those systems. Novel requirements regarding energy efficiency, performance, size, and reliability must be taken into account from the very beginning. The measurement tool of the MicroProf® series supports the evaluation of reliability and service life while considering the requirements from the application point of view.

For further information please visit www.frtmetrology.com.

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Person in charge
Marcus Hildebrandt | Fraunhofer Institute for Electronic Nano Systems ENAS | Phone +49 371 45001-432 | 
Technologie-Campus 3 | 09126 Chemnitz | Germany | www.enas.fraunhofer.de | marcus.hildebrandt@enas.fraunhofer.de

Editors
Dr. Martina Vogel | Fraunhofer Institute for Electronic Nano Systems ENAS | Phone +49 371 45001-203 | 
Technologie-Campus 3 | 09126 Chemnitz | Germany | www.enas.fraunhofer.de | martina.vogel@enas.fraunhofer.de

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