Fraunhofer Institute for Electronic Nano Systems
Fraunhofer Institute for Electronic Nano Systems

»Process, Device and Packaging Technologies«

»MEMS Technology Platforms«

 

Prof. Dr. Karla Hiller

Head of Group »MEMS/NEMS Technologies«, »Deputy Ombudsperson«

Fraunhofer Institute for Electronic Nano Systems ENAS
Technologie-Campus 3
09126 Chemnitz

Telefon +49 371 45001-400