Fraunhofer Institute for Electronic Nano Systems
Fraunhofer Institute for Electronic Nano Systems

»Process, Device and Packaging Technologies«

»Nanotechnological Components and Systems«

 

Dr. Patrick Matthes

Head of Group »Nano Devices / PVD«

Fraunhofer Institute for Electronic Nano Systems ENAS
Technologie-Campus 3
09126 Chemnitz

Telefon +49 371 45001-611