Fraunhofer Institute for Electronic Nano SystemsFraunhofer ENAS develops in different projects micromechanical acceleration sensors with specific parameters, which are adapted to the intended use. These include, for example, developments for the use of acceleration sensors in medical implants. The challenge is to make the sensors very small in size while retaining high sensitivity. This is mainly realized by an appropriately large aspect ratio.
Sensors have been developed for pulse detection, for monitoring patient positioning or for controlling the position of implants, among other applications. The sensors produced in cooperation with the Center for Microtechnologies at Chemnitz University of Technology using BDRIE technology are characterized by a high aspect ratio due to particularly deeply etched electrode structures of up to 100 μm depth. Sensitivity is also increased by the small distances between the electrodes. This makes it possible to realize particularly small and sensitive sensor elements. The acceleration sensors can resolve movements in the picometer range. Biocompatible packaging and surface nanostructuring complete the research on implantable systems at Fraunhofer ENAS.
In further projects a multitude of different MEMS elements for the detection of accelerations have been developed. These were developed adapted to the respective application. With the help of demonstrators the sensor systems were characterized and the required parameters were verified.