Fraunhofer Project Center

Fraunhofer Project Center “NEMS / MEMS Devices and Manufacturing Technologies at Tohoku University”

Tohoku University,
2-1-1 Katahira, Aoba-ku,
Sendai 980-8577, Japan

 

Prof. Dr. Shuji Tanaka
Phone: +81 22 795 6934
E-mail: tanaka@mems.mech.tohoku.ac.jp

 

Contact in Germany

Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Technologie-Campus 3
09126 Chemnitz

 

Prof. Dr. Thomas Otto
E-Mail: thomas.otto@enas.fraunhofer.de
Phone: +49 371 45001-100