Management of the Institute

Deputy Director

Curriculum Vitae Prof. Schulz

Stefan E. Schulz studied »electronic devices / microelectronics technology« at Karl‑Marx‑Stadt (Chemnitz) University of Technology and completed his doctoral thesis to Dr.-Ing. in the field of »Tungsten-based on-chip interconnects« at Chemnitz University of Technology in 1996.

Until 2008, he worked initially as research assistant, later as senior engineer at Chemnitz University of Technology, Faculty for Electrical Engineering and Information Technology, Center for Microtechnologies in the fields of on-chip interconnect systems and 3D integration. From 2003 to 2008 he was furthermore engaged in a secondary employment as expert for micro and nanoelectronics at Fraunhofer Institute for Reliability and Microintegration (IZM).

In 2008, Stefan E. Schulz became Head of the department Back-end of Line (BEOL) of the newly founded Fraunhofer ENAS (Fraunhofer Research Institution for Electronic Nano Systems, since 2011 Fraunhofer Institute for Electronic Nano Systems). In 2020, the department was renamed to Nano Device Technologies as consequence of the current profile of the department.  

He was appointed as Honorary Professor for »Nanoelectronics Technologies« at Chemnitz University of Technology in the year 2008. In 2013 he became Spokesman of the newly founded Fraunhofer Cluster 3D Integration.

Since 2014, Stefan E. Schulz is Deputy Head of the Fraunhofer Institute for Electronic Nano Systems (Fraunhofer ENAS).

He authored and co-authored more than 150 publications in journals, books and conference proceedings, held 11 invited speeches at international congresses and symposia, and is inventor of 3 granted patents and 4 published patent applications.