• Scanning electron microscopy REM / EDX

• Atomic force microscopy AFM

• Variable angle spectroscopic ellipsometry

• Laser profilometry (UBM, TENCOR FLX-2900)

• Surface profilometer

• US-Microscope

• Tension/Compression testing machine Zwick 4660 universal

Perkin-Elmer DMA 7e dynamic mechanical analyser

Micromechanical testing instrument

Lifetime scanner