Fraunhofer Institute for Electronic Nano SystemsFeatures
- Single crystal silicon based 2-axis inclination measurement (x and y)
- Ultra low cross axis sensitivity due to HARMS technology
- Over damped frequency response
- Low noise
- Excellent stability over temperature
- Excellent reliability against overload
- No sticking due to entire dry processing
Application
- ASTROSE® project – sensor network for condition monitoring of power lines
- Geoengineering
- Leveling instruments
- Platform control and stabilization