Back-end of Line
Fraunhofer Institute for Electronic Nano Systems
Materials and Metallization for NEMS
Materials and methods for interconnect systems in nano-electromechanical systems (NEMS) is an emerging topic at the ENAS department Back-End of Line. Because carbon nanotubes (CNT), due to their unique properties, appear of particular interest for NEMS based sensors and actuators, current work concentrates on contact formation between metal electrodes and CNTs. In this respect, methods such as dielectrophoresis for the controlled lateral deposition of carbon nanotubes as well as atomic layer deposition (ALD) for three-dimensional functionalization and metallization of CNTs are studied.