Contact

Fraunhofer Institute for Electronic Nano Systems

Multi Device Integration

  • Prof. Dr. Thomas Otto

    Deputy Director of Fraunhofer ENAS and Head of Department

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-231
    • Fax +49 371 45001-331

  • Sabrina Böhm

    Secretariat

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-221
    • Fax +49 371 45001-321

Working groups

  • Dr. rer. nat. Jörg Martin

    Group leader Development of Components and Systems

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-244
    • Fax +49 371 45001-344

  • Philipp Böttger

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz

    • Phone +49 371 531-39878

  • Dr. Kathleen Heinrich

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-449

  • Martin Möbius

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-39461

  • Ray Saupe

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-243
    • Fax +49 371 45001-343

  • Thomas Seider

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-32593

  • Dr. rer. nat. Christian Spudat

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-245
    • Mobile +49 371 45001-345

  • Alexander Weiß

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-246
    • Fax +49 371 45001-346

  • Dr.-Ing. Jörg Nestler

    Group leader Fluidic Integration and System Technologies

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 45001-240
    • Fax +49 371 45001-340

  • Duc Bach

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-247
    • Fax +49 371 45001-347

  • Tom Enderlein

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-38223

  • Christian Helke

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-39545

  • Sascha Geidel

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-199

  • Andre Gratias

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-38996

  • Allyn Große

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 45001-458

  • Mathias Lipowski

    Depatment Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-276
    • Fax +49 371 45001-376

  • Andreas Morschhauser

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-36482

  • Martin Schüller

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-242
    • Fax +49 371 45001-342

  • Cornelia Stiehl

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 45001-453

  • Dr.-Ing. Detlef Billep

    Deputy Head of Department and Group leader MEMS/NEMS Design

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-250
    • Fax +49 371 45001-350

  • Roman Forke

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-254
    • Fax +49 371 45001-354

  • Annett Krusch

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-456

  • Jinji Luo

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-199

  • Reinhard Schuberth

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-251
    • Fax +49 371 45001-351

  • Robert Schulze

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-38675

  • Chris Stöckel

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 45001-454

  • Petra Streit

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-37962

  • Alexander Tsapkolenko

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-493

  • Quan Wen

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-37751

  • Dr.-Ing. Steffen Kurth

    Group leader Metrology

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-255
    • Fax +49 371 45001-355

  • Toni Großmann

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-199

  • Miroslav Kotzev

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-294

  • Marco Meinig

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-257
    • Fax +49 371 45001-357

  • William Mende

    Department Multi Device Integration

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-236

  • Sven Voigt

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-37254