Contact

Fraunhofer Institute for Electronic Nano Systems

Back-end of Line

  • Prof. Dr. Stefan E. Schulz

    Head of Department

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-232
    • Fax +49 371 45001-332

  • Birgit Weber

    Secretariat

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-222
    • Fax +49 371 45001-322

Working Groups

  • Dr.-Ing. Knut Gottfried

    Deputy Head of Department and Group leader Processes and Process Monitoring

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-299
    • Fax +49 371 45001-399

  • Lutz Hofmann

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 531-36548

  • Ronny Martinka

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-291
    • Fax +49 371 45001-391

  • Ina Schubert

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-282
    • Fax +49 371 45001-382

  • Manuela Zacher

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-285
    • Fax +49 371 45001-385

  • Dr.-Ing. Ramona Ecke

    Group leader Process Integration

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-281
    • Fax +49 371 45001-381

  • Nicole Ahner

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35020

  • Tobias Fischer

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-38226

  • Ines Hartwig

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-37217

  • Dr.-Ing. Knut Schulze

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-297
    • Fax +49 371 45001-397

  • Olaf Ueberschär

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-433
    • Fax +49 371 45001-533

  • Dr.-Ing. Sven Zimmermann

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-279
    • Fax +49 371 45001-379

  • Dr.-Ing. Thomas Wächtler

    Group leader Nanomaterials and Analytics

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-280
    • Fax +49 371 45001-380

  • Dr.-Ing. Sascha Hermann

    Group leader Nanomaterials and Analytics

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35675

  • Dr. rer. nat. Thomas Blaudeck

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-289
    • Fax +49 371 45001-389

  • Dileep Dhakal

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09107 Chemnitz, Germany

    • Phone +49 371 531-32592

  • Dr. rer. nat. Jens-Wolfram Erben

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 531-35048

  • Holger Fiedler

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-38572

  • Sergei Loschek

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-38487

  • Jana Tittmann

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 45001-610

  • Dr.-Ing. Reinhard Streiter

    Group leader Process and Equipment Simulation

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-288
    • Fax +49 371 45001-388

  • Dr. Jörg Schuster

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-286
    • Fax +49 371 45001-386

  • Christian Wagner

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-38699

  • Dr. Hermann Wolf

    Department Back-end of Line

    Technologie-Campus 3
    09126 Chemnitz, Germany

    • Phone +49 371 45001-287
    • Fax +49 371 45001-387

  • Xiao Hu

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09107 Chemnitz, Germany

    • Phone +49 371 45001-199

  • Andreas Zienert

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-37937