Contact

Fraunhofer Institute for Electronic Nano Systems

Department Lithography

  • Dr.-Ing. Andreas Bertz

    Head of Department Lithography

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-33129

  • Gunther Schwenzer

    Deputy Head of Departement Lithography

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-33682

  • Markus Arnold

    Fraunhofer-Institut für Elektronische Nanosysteme ENAS

    Technologie-Campus 3
    09126 Chemnitz

    • Phone +49 371 45001-199

  • Jörn Bankwitz

    Chemnitz University of Technology, Center for Microtechnologies

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-37718

  • Mandy Bruder

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-37746

  • Dr. rer. nat. Jens-Wolfram Erben

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35048

  • Jürgen Grunert

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35094

  • Sven Haas

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 45001-452

  • Ingrid Hempel

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35082

  • Ingo Klimmt

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-33640

  • Matthias Küchler

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35836

  • Dr. Christoph Robert Meinecke

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 45001-492

  • Dr. Danny Reuter

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35041

  • Falk Schwenzer

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-33682

  • Isa Streiter

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35084

  • Thomas Werner

    Department Lithography

    Reichenhainer Straße 70
    09126 Chemnitz, Germany

    • Phone +49 371 531-35515