"RF MEMS" comprises manufactoring of components for radio frequency applications, which electrical properties may vary based on implementation of micromechanical components or which functiomality is mainly determined by mechanical components. RF MEMS include RF MEMS switches and varactors, which will be able to substitute existing convertional products or enable new applications due to better electrical performance. The market of RF MEMS can be divided into two parts.

Aeronautic applications, security and defence applications as well as measuring technique belong to the first one. Therefore components are required with extremly high demands on performance (at the threshold of the physical possibilities).

The second market is communication technique (stationary and mobile). Thereby the improvement of main properties is in the focus. These are power requirements, configuration as well as functionality. RF MEMS can be applied for instance as tunable filters. By using tunable components it is possible to ensure their functionality at different frequencies and standards without constructing parallel signal paths.

The following topics are in the focus:

• Concepts and developments of RF MEMS,

• Development of technologies for manufacturing and integration of RF MEMS,

• Prototypes and small series.