"High precision MEMS/NEMS" includes the development of prototypes and system solutions of high precision micro electro mechanical systems (MEMS) and nano electro mechanical systems (NEMS). The focus is on high precision actuators for optical MEMS as well as on high precision inertial sensors for industrial applications, navigation and medical application. Fraunhofer ENAS provides services in:

• MEMS/NEMS design and modeling,

• System design and modeling,

• Technology development,

• MEMS/NEMS test,

• System test,

• Prototypes manufactured by basic and special technologies.