The business unit "Mirco and Nano Systems" includes all silicon based and polymer based micro and nano systems. According to markets and customers it is divided onto the three parts "High precision MEMS/NEMS", "Polymer Based low-cost MEMS/NEMS" and "RF-MEMS". The business unit is based on the core competences "Design and Test of Components and Systems", "Silicon Based Micro and Nano Technologies", "Polymer Based Micro and Nano Technologies", "System Integration Technologies" and "Reliability of Components and Systems".